PopisThe FMA-1600A Series mass and volumetric flowmeters use the principle of differential pressure within a laminar flow field to deterime the mass flow rate. A laminar flow element (LFD) insdie the meter forces the gas into laminar (streamlined) flow. Inside this region, the Poiseuille equation dictates that the volumetric flow rate be linearly related to the pressure drop along a fixed distance of the LFE. This, along with the viscosity of the gas, is used to accurately determine the volumetri flow rate. Separate absolute temperature and pressure sensors are incorporated and correct the volumetric flow rate to a set of standard conditions. This standardized flow rate is commonly called the mass flow rate and is reported in units such as standard cubic feet per minute (SCFM) or standard liters per minute (SLM).
|Max Flow Rate||0.5 to 50 SCCM||0.1 to 10 SLM||20 SLM||50 SLM||100 SLM||250 SLM||500 SLM||1000 SLM||1500 SLM|